Institut für Funktionelle Grenzflächen (IFG)

IONTFOF TOF.SIMS 5

Spezifikationen: IONTFOF TOF.SIMS 5

Device Designation: Tof-Secondary Ion Mass Spectrometer
Classification: Tof-Secondary Ion Mass Spectrometer
Description/Features:  
  • Primary ion sourec: Bi liquid metal ion gun, C60 gun

     

  • sputter gun: Cesium/oxygen dual source, C60

     

  • reflectron type analyzer, sample heating/cooling  or rotation in UHV
Keywords: SIMS, surface analysis, mass spectrometry, imaging, depth profiling