Fabrication and characterization of iron and fluorine co-doped BST thin films for microwave applications

  • chair:

    Stemme, F. / Bruns, M. / Geßwein, H. / Schroeder, M. / Sazegar, M. / Drahus, M. / Eichel, R. / Paul, F. / Azucena, C. / Binder, J. (2013)
  • place:

    Journal of Materials Science 48 (2013), 9, 3586-3596

     
  • Date: 2013

  • Stemme, F. / Bruns, M. / Geßwein, H. / Schroeder, M. / Sazegar, M. / Drahus, M. / Eichel, R. / Paul, F. / Azucena, C. / Binder, J. (2013): „Fabrication and characterization of iron and fluorine co-doped BST thin films for microwave applications“. In: Journal of Materials Science 48 (2013), 9, 3586-3596

Abstract

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The effects of fluorine co-doping by means of a post-thermal annealing process of iron-doped BST thin films in a fluorine-containing atmosphere have been investigated. XPS and ToF-SIMS sputter depth profiling verified a homogeneous fluorine distribution in the thin films. By employing EPR, it was shown that singly charged ( Fe′Ti – VO ) defect complexes, as well as ‘isolated’ FeTi centres with a distribution of FO sites in remote coordination spheres exist in the fluorinated films. Tunability enhancement due to fluorine co-doping as well as a Q-factor enhancement due to iron doping is demonstrated.